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All AMCF Scanning Electron Microscopes are equipped with Energy Dispersive Spectroscopy (EDS) detectors for elemental microanalysis and X-ray mapping (XRM). These detectors allow us to generate an EDS spectrum, which is a spectrum of the x-ray energies emitted from a spot or an area of a sample. As every element has specific characteristic X-ray energies, we are able to determine a sample’s elemental composition. If the sample is prepared properly, results can be both qualitative and quantitative.
X-ray Mapping (XRM) is the collection of characteristic X-rays as a function of the position of the scanning electron beam on the sample. In other words, we are collecting an EDS spectrum for each pixel in an SEM image. Using an XRM software package, we are then able to extract data from all of the spectra collected, and colour code each pixel in an image to show what elements are present.
The X-ray intensity distributions of the elements from an X-ray map allow us to generate two dimensional and ternary scatter diagrams, converting spatial information into concentration dimensions. This is an important tool for displaying the spatial relationships of elements or correlated elements (phases) in materials. The method to accomplish this is through the use of two and three-dimensional (2D and 3D) scatter (or correlation) diagrams, which are generated from the X-ray maps.
From these scatter diagrams we observe clusters, also referred to as nodes, which correspond to different chemical phases. We can also observe linking (connection) between clusters indicating the boundaries between phases within a material as well as branching from clusters (some links may contain branches).
From the clusters observed in the scatter diagram, it is possible to map the phases. This is often referred to as phase mapping, but really it should be called chemical phase mapping (CPM), as phase mapping assumes knowledge of crystal structure and requires diffraction analysis.
Chemical phase mapping (CPM) involves selecting areas on the scatter diagrams and observing where the points or clusters relate on the BSE image and is an important part of the phase identification process. These selected analysis points may then be summed for a more accurate analysis in total or by selecting strategic areas on the image.